| 摘要 |
PURPOSE:To make the end face of a silicon block parallel to the cutting direction of a cutting member by a method wherein the distance to the cut end face under the state that a dummy member is joined to the end face of the silicon block and the distance to the end face under the state that the dummy member is removed, are detected, and resetting is done so as to make the difference between both said distances equal to a certain value. CONSTITUTION:A dummy member 23 is joined to the end face 20A of a silicon block 20. The external peripheral surface of the dummy member 23 is cut off by gradually shifting the rotating shaft 12A of a cutting member 12 while rotating toward a holding member 11 and the silicon block 20, both of which are held stationarily. The distance S11 to the end face 23A of the dummy member 23 is detected with a displacement sensor 13 and memorized. After that, the dummy member 23 is removed from the end face 20A. As a result, the distance S12 between the displacement sensor 13 and the end face 20A of the silicon block 20 is given to an arithmetic circuit 14A, which slants the holding member 11 so as to make the difference between the distances S11 and S12 equal to a certain value. During the shifting of the displacement sensor 13 along the standard shifting locus S10 by means of the arithmetic circuit 14A, the action is repeated until the difference between the newly detected distance S12<x> and the initial distance S11 becomes equal to the certain value. |
