MAGNETRON CATHODE SPUTTERING APPARATUS,申请号EP19840103049-传众专利搜索

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发明名称	MAGNETRON CATHODE SPUTTERING APPARATUS
摘要
申请公布号	EP0119631(B1)	申请公布日期	1989.02.01
申请号	EP19840103049	申请日期	1984.03.20
申请人	THE BOC GROUP PLC	发明人	MCKELVEY, HAROLD E.
分类号	C23C14/36;C23C14/04;C23C14/35;C23C14/50;H01J37/34;(IPC1-7):C23C14/34	主分类号	C23C14/36
代理机构		代理人
主权项
地址

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