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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6431459(A)
申请公布日期
1989.02.01
申请号
JP19870187330
申请日期
1987.07.27
申请人
NEC CORP
发明人
MUKAI KANJI
分类号
H01L21/8222;H01L21/331;H01L27/06;H01L29/72;H01L29/73
主分类号
H01L21/8222
代理机构
代理人
主权项
地址
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