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发明名称
MAGNETRON SPUTTER DEVICE HAVING SEPARATE CONFINING MAGNETIC FIELDS TO SEPARATE TARGETS AND MAGNETICALLY ENHANCED R.F. BIAS
摘要
申请公布号
EP0227438(A3)
申请公布日期
1989.02.01
申请号
EP19860309903
申请日期
1986.12.18
申请人
VARIAN ASSOCIATES, INC.
发明人
MINTZ, DONALD M.
分类号
C23C14/36;C23C14/34;C23C14/35;C23C14/54;H01J37/34;H01L21/203;H01L21/285;H01L21/31;(IPC1-7):H01J37/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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