| 摘要 |
PURPOSE:To enable a cylindrical electrostatic-energy analyzer with high energy- analyzing efficiency to be used, and increase the resolution of a mass spectrograph by providing a lens between the energy analyzer and the mass spectrograph. CONSTITUTION:A lens 3, which is constituted by placing three lens electrodes 15-17 parallel to each other, is installed in the middle of a double-cylindrical electrostatic-energy analyzer 1, which is constituted of an inner and an outer cylindrical electrodes 5 and 4 having the same central axis, and a tetra-polar mass spectrograph 2 having a tetra-polar part 14, which is constituted of two pairs of pole electrodes located on the X and the Y axes. Charged particles 10 such as secondary ions developing from a sample 9 are analyzed with the analyzer 1, and are focused on an image point 12. Then, charged particles, after passing through the image point 12, are deflected with the lens 3, and are focused on an image point 19. Since the point 19 is apart from the lens 3 and is located on the Z axis, the incidence angle of the beam of charged particles, which is incident upon the mass spectrograph 2, becomes small and is located between the electrodes of the tetra-polar part 14. Consequently, the resolution of the mass spectrograph 2 is increased. |
