| 摘要 |
PURPOSE:To transfer the semiconductor wafers housed in a carrier to the other carrier without any manual operations by providing a pair of substrate housing means to the frame which is rotatably supported on the base. CONSTITUTION:A frame 2 rotatably supported by a base 10 and a pair of substrate housing means 1, 1' are provided and the sample housed in one of the pair of substrate housing means 1, 1' is transferred to the other means by inclining the frame 2. For instance, the frame 2 is inclined and secured by the fixing clicks 6 provided in both ends of frame 2 and fixing shaft 9 and the carrier 3 housing the substrate 11 is loaded to the upper aperture 1a of the carrier holder 1. The carrier holder 1 loading the carrier 3 is rotated in lateral for 90 degrees through a hinge 5 and thereby the frame 2 is inclined in the reverse direction and is fixed by the fixing clicks 6. At this time, the substrate 11 slides in accordance with the inclination angle and isolates from the carrier 3 due to the rotating movement. The substrate is then guided by the guide 4 and is housed by the other carrier 3'. |
