| 摘要 |
<p>PURPOSE:To make it possible to prevent damage to a water during its transfer by a method wherein a wafer holding part, which enables self hold of the wafer and release of the holding of the wafer, is provided on the inner side of a cap for sealing the aperture of a carrier main body. CONSTITUTION:When the pressure in tubes 26a and 26b is increased, the elliptical sections of the tubes turn into a circle. As a result, the radiuses of curvature of the tubes 26a and 26b are increased and free end parts 24a-d move toward the outside. If the end parts 24a-d move, pawls 23a-c also move together with the end parts. Reversely, when the pressure in the tubes 26a and 26b is decreased, the end parts 24a-d move toward the inside. Accordingly, a wafer 5 can be held by pawls 25 at an atmospheric pressure or thereabouts and when the air of a pressure higher than the atmospheric pressure is fed, the pawls 25 can release the holding of the wafer 5. Thereby, a wafer holding part 4 can self-hold the wafer 5 at the time of transfer and so on without feeding the compressed air.</p> |
