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发明名称
DRIER
摘要
申请公布号
JPS6428824(A)
申请公布日期
1989.01.31
申请号
JP19870183367
申请日期
1987.07.24
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
TAKEUCHI YOSHIAKI;MURAMATSU KIMIO;NAKAGAWA TAKASHI;OKADA TSUNEO
分类号
H01L21/304;F26B3/347
主分类号
H01L21/304
代理机构
代理人
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