Charged particle accelerator using quadrupole electrodes

摘要

PCT No. PCT/JP84/00557 Sec. 371 Date Jul. 29, 1985 Sec. 102(e) Date Jul. 29, 1985 PCT Filed Nov. 22, 1984 PCT Pub. No. WO85/02489 PCT Pub. Date Jun. 6, 1985.A charged particle accelerator is provided with quadrupole electrodes with surfaces that are opposed to each other and are undulated, and with an external resonance circuit. The external resonance circuit consists of a capacitor formed by the opposing electrodes, a variable capacitor provided in parallel with said capacitor, and a coil. The resonance frequency is variable. A direct current and an alternating current may be applied in a superposed manner to the quadrupole electrodes. The thus constructed accelerator can be employed for an ion implanter to implant a heavy-current ion beam of several hundred KeV to several MeV.