| 摘要 |
PURPOSE:To restrain the generation of warping of a sintered body, improve the smoothness of the same and increase the yield of an element, by a method wherein a ceramics sheet, having good smoothness, is laid on the bottom of a sintering box, and the foil or sheet of gold, platinum or the alloy of gold or platinum is put thereon while a laminate, after laminated by a hot press, is put on to sinter them integrally. CONSTITUTION:An alumina sheet 4, having a good smoothness, is laid on the bottom of an alumina sintering box 7 and a platinum sheet 5 is put on the alumina sheet 4, while a laminated body 3, in which a thin layer of ceramics and a conductive material laminated, is put thereon. The laminated body 3 is covered with zirconium oxide powder 6, calcined at the temperature of 1,200 deg.C, until the laminated body can not be seen. Subsequently, an alumina lid 8 is put on and the sintering body 7 is inserted into a sintering furnace. A temperature in the furnace is risen to 1,120 deg.C with the temperature rising speed of 150 deg.C/Hr upon sintering, then, is kept at 1,120 deg.C for 2hr, thereafter, the laminated body 3 is cooled naturally and is taken out of the furnace at the temperature of lower than 100 deg.C. |
