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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6427245(A)
申请公布日期
1989.01.30
申请号
JP19870183205
申请日期
1987.07.22
申请人
SONY CORP
发明人
OKAMOTO YUTAKA
分类号
H01L23/522;H01L21/28;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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