| 摘要 |
PURPOSE:To improve saturation magnetic flux density and high-frequency magnetic properties, by forming a polycrystalline alloy film having specific composition, structure, and crystalline grain size by adding elements such as Ti, Zr, and Hf in an alloy containing Fe-B as principal components. CONSTITUTION:This alloy film is a polycrystalline alloy film having a composition represented by a formula (atom.%) and also having a body-centered cubic structure, and, in this alloy film, grain size measured based on the maximum size of a polycrystalline grain is regulated to <=500Angstrom in average. In the formula, M means one or more elements among Ti, Zr, Hf, V, Nb, Ta, Cr, W, Mn, Ru, Rh, Pd, Os, Ir, and Pt and the symbols (x) and (y) stand for 2-10 and 0-10, respectively. In this alloy, the additive metal M has the effect of improving wear resistance and corrosion resistance. By the presence of the above, characteristics well balanced each other as an alloy film for magnetic head to a greater extent can be provided, but, when (y) exceeds 10, saturation magnetic flux density is reduced. Further, when the average crystalline grain size exceeds 500Angstrom , magnetic permeability is reduced. |
