| 摘要 |
<p>PURPOSE:To reduce the transport time and reduce the occupation area by traction-shifting a dolly having wheels rolling on a horizontal surface and a vertical surface of a rail by a wire and mounting a cassette on the dolly, in the titled device for semiconductor wafers. CONSTITUTION:A wire 16 is travelled on a rail 11 through the tension adjusting pulleys 20 and 20, driving pulley 22, and an intermediate pulley 17 by the drive of a motor 21. The both edge parts 16a of the wire 16 are connected with the connecting pulley 23 of a dolly 12. Therefore, the dolly 12 onto which a cassette 1 is mounted is shifted on the rail 11 by the wheels 13 and 14 in a prescribed direction by the pulling of the wire 16. The dolly 12 is decelerated and stopped at each prescribed position by a deceleration or stop sensor 24 installed on the dolly 12. By such constitution, the transport time can be reduced, and the occupation area can be reduced.</p> |
