| 摘要 |
PURPOSE:To enable efficient inspection through the prevention of damage of substance to be tested, by so constituting the same that the specified corner of the substance to be tested in a recess is adhered to the reference corner in the recess via an external magnet, when the nonmagnetic table having recess containing the magnetic substance to be tested is moved to the position of test. CONSTITUTION:The nonmagnetic table 16 is located at a specified position and the magnetic head 1 at the exit 12 is moved in the recess 19 by using a robot 8. The operation means 17 moves the table 16 to the substance of test. On its way, the reference corner 20 of the magnetic head 1 is adhered to the reference corner 21 of a recess 19 with the magnetic force of a permanent magnet 18. At this position, inspection is made with the inspection device 6. Next, the operation means 17 returns the table 16 to the original position to repeat the inspection. Thus, damages of substance to be tested are avoided to perform efficient inspection. |
