发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To reduce a standby current increased due to a heat treatment at the time of assembling by irradiating a semiconductor chip having a high resistance element after assembling with an ultraviolet ray. CONSTITUTION:After an element 10 having a plasma nitride film 16 is bonded to a chip at 450-480 deg.C, hydrogen diffused from the film 16 into a high resistance polycrystalline silicon 14 is separated by irradiating it with an ultraviolet ray, a high resistance polycrystalline silicon 14 is enhanced in its, resistance, thereby reducing a standby current. Then, a frame is wired to a chip, and a whole lead frame is sealed with molding resin.
申请公布号 JPS6425426(A) 申请公布日期 1989.01.27
申请号 JP19870180998 申请日期 1987.07.22
申请人 OKI ELECTRIC IND CO LTD 发明人 OKADA NORIAKI;UMEZAWA NOBORU
分类号 H01L21/52;H01L21/822;H01L21/8244;H01L27/04;H01L27/10;H01L27/11 主分类号 H01L21/52
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