| 摘要 |
<p>PURPOSE:To enable controlling that a table does not move out of a wafer by bringing a pickup region into coincidence with a wafer region by utilizing the coordinates of the central position of the wafer and wafer radius calculated from data on input position coordinates. CONSTITUTION:Arbitrary three points P1, P2, P3 on the outer periphery of a wafer 1 are input to a semiconductor pellet mounting device. The center coordinates (X0, Y0) of the wafer and wafer radius R are calculated from the coordinates (X1, Y1), (X2, Y2), (X3, Y3) of the input three points P1, P2, P3. A circular pickup region 5 of radius R is set in new coordinates system with the coordinates (X0, Y0) of the wafer center thus obtained as an origin to completely bring the pickup region into coincidence with the wafer region.</p> |
