VAPOR DEPOSITION DEVICE OF THIN FILM,申请号JP19870181077-传众专利搜索

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发明名称	VAPOR DEPOSITION DEVICE OF THIN FILM
摘要
申请公布号	JPS6425973(A)	申请公布日期	1989.01.27
申请号	JP19870181077	申请日期	1987.07.22
申请人	HITACHI LTD	发明人	MIYAUCHI AKIHIRO;ONOSE HIDEKATSU;OGAMI MICHIO;SUZUKI TAKAYA
分类号	H01L21/203;C23C14/32	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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