发明名称 DRIVER HAVING PRESSURE MEMBER
摘要 <p>PURPOSE: To minimize the pressure member by engaging a first roller segment of the pressure member with a fixed support and a second roller segment located opposite to the first roller segment with an adjustable member. CONSTITUTION: A pressure member 17 is one piece with a driving shaft 3, and engaged with a fixed support 19 on one side so that the pressure parallel to a second axis of a roller 23 is applied to the side opposite to the said side. The pressure member 17 also has a first roller segment 29, of which the contacting line 31, identical to a first axis 5, is engaged with the support 19. The contacting line 35 of a second roller segment 33 is engaged with an adjustable member 25. The contacting lines 31, 35 constitute the generatrix of a first cylinder 37 and a second cylinder 39 respectively. Assuming that the distance in the moving direction of the load body 23 between the axis 45 of the cylinder 37 and the axis 47 of the cylinder 39 is S, the distance in the moving direction of the load body 23 between the contacting lines 31, 35 is S+D (D is the diameter of the cylinder).</p>
申请公布号 JPS6426058(A) 申请公布日期 1989.01.27
申请号 JP19880141931 申请日期 1988.06.10
申请人 A S M RITOGURAFUII BV 发明人 EDOUIN YOHAN BUISU
分类号 F16H37/12;F16H21/18;F16H21/20;F16H21/44;F16H25/14;F16H25/18;G03F7/20;H01L21/027;H01L21/30;H01L21/68 主分类号 F16H37/12
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