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发明名称
EVAPORATING APPARATUS FOR VOLATILE MATERIAL
摘要
申请公布号
JPS6425524(A)
申请公布日期
1989.01.27
申请号
JP19870182569
申请日期
1987.07.22
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MORIZAKI MOTOJI;OGURA MOTOTSUGU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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