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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPS6424049(A)
申请公布日期
1989.01.26
申请号
JP19870176891
申请日期
1987.07.15
申请人
SEIKO INSTR & ELECTRON LTD
发明人
WAKATSUKI TAKASHI
分类号
C03C15/00;C03C17/22
主分类号
C03C15/00
代理机构
代理人
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