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经营范围
发明名称
VAPOR GROWTH EQUIPMENT
摘要
申请公布号
JPS6424414(A)
申请公布日期
1989.01.26
申请号
JP19870179889
申请日期
1987.07.21
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
KOAIZAWA HISASHI;KOMURA YUKIO;KANEDA KAZUHARU;IKEDA MASAKIYO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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