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发明名称
DEVICE OF DETECTING CHARGED BEAM DISTRIBUTION CONDITION
摘要
申请公布号
JPS6424354(A)
申请公布日期
1989.01.26
申请号
JP19870181973
申请日期
1987.07.21
申请人
YOKOGAWA ELECTRIC CORP
发明人
SUZUKI YASUYUKI
分类号
H01J37/317;H01J37/04;H01J37/244
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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