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发明名称
APPARATUS FOR MANUFACTURING COMPOUND SEMICONDUCTOR FILM
摘要
申请公布号
JPS6423540(A)
申请公布日期
1989.01.26
申请号
JP19870178994
申请日期
1987.07.20
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
OKI AKIRA;SHIBATA NORIYOSHI;MAEBOTOKE SAKAE
分类号
H01L21/365
主分类号
H01L21/365
代理机构
代理人
主权项
地址
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