发明名称 METHOD AND APPARATUS FOR FORMING FINE CONDUCTOR LAYER PATTERN
摘要 PURPOSE:To obtain a film having good conductivity and uniformity on a ceramic surface by bonding a foil of metal on the outer periphery of a cylinder made of a ceramic base material of predetermined shape, coating the surface of the material with a solution-like superconductor, forming a fine conductor layer pattern, and then baking it at the optimum sintering temperature of the thin film. CONSTITUTION:A cylindrical ceramic material 1 is cleaned and a metal foil 5 of copper or copper alloy formed with a fine pattern 4 is bonded to the outer periphery of the material 1. A drive motor 7 rotates the material 1 attached to a hook 6 at a predetermined speed. A spray gun 8 coats the surface of the material 1 with solution-like superconductor 12 by air 13. Then, the superconductor is baked at an optimum temperature, and sintered. The thin film includes, for example oxide series, such as La-Sr-Cu-O or Y-Ba-Cu-O or organic materials.
申请公布号 JPS6423597(A) 申请公布日期 1989.01.26
申请号 JP19870179397 申请日期 1987.07.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKAKURA YOSHINORI
分类号 C04B41/87;C01G1/00;H01B12/06;H01B13/00;H01F6/06;H01L39/24;H05K3/14 主分类号 C04B41/87
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