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发明名称
MULTI-CHAMBER DEPOSITION SYSTEM
摘要
申请公布号
EP0258966(A3)
申请公布日期
1989.01.25
申请号
EP19870305519
申请日期
1987.06.22
申请人
MINNESOTA MINING AND MANUFACTURING COMPANY
发明人
JACOBSON, RICHARD L. C/O MINNESOTA MINING AND;JEFFREY, FRANK R. C/O MINNESOTA MINING AND
分类号
C23C14/24;C23C14/54;C23C14/56;C23C16/02;C23C16/54;(IPC1-7):C23C16/54
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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