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发明名称
PLASMA ETCHING SYSTEM
摘要
申请公布号
JPS6422029(A)
申请公布日期
1989.01.25
申请号
JP19870178692
申请日期
1987.07.17
申请人
TOSHIBA CORP
发明人
FUJIWARA NAOYOSHI;HAMASHIMA KOTARO;NAKANO MASANOBU;HORI ITSUKO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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