| 摘要 |
PURPOSE:To make the temperature of each rod member uniform, restrict the fluctuation of mirror alignment, and obtain stable laser output, by making temperature-controlled fluid flow from a fluid supplying source to a supplying pipe, and supplying the fluid to each rod member having the same shape via branching pipes having the same diameter and length. CONSTITUTION:Rod members 5 arranged between retaining frames 2, 3 are hollow, in which temperature-controlled fluid flows. Between the retaining frames 2, 3, retaining plates 6, 7 are arranged through which a discharge tube 1 and the four rod members 5 are inserted and held. A pipe 10 on the supplying side is made to branch off in pipes 11, 12 having the same diameter and length. Each of the tips of them is further made to branch off in two pipes 13, 14 and 15, 16 having the same diameter and length, and connected to each rod member 15. Pipes on the discharging side have the same configuration. That is, four pipes 17, 18,... having the same diameter and length are joined to two pipes 20, 21 having the same diameter and length. Further the tips of them are jointed to one pipe 22, which is connected to an discharging equipment. |
