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发明名称
HOT WALL EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPS6420610(A)
申请公布日期
1989.01.24
申请号
JP19870177596
申请日期
1987.07.15
申请人
FUJITSU LTD
发明人
EBE KOJI;NISHIJIMA YOSHITO;SHINOHARA KOJI
分类号
H01L21/203;H01L21/363
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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