Electrode boat apparatus for processing semiconductor wafers or the like

摘要

An electrode boat assembly for holding workpieces to be processed within a chemical reaction process during the chemical vapor process. The electrode boat assembly comprises a plurality of electrode plates held in position by rods and spacer sleeves in order to provide easy assembly and disassembly. Two of the rods are electrically conductive in order to set up plasma field between adjacent electrode plates. Insulating spacer sleeves over the conductive rods preclude plasma formation at unwanted locations. The spacers sleeves and electrode rods have substantially the same coefficient of thermal expansion to minimize warpage and breakage of electrode boat components.