发明名称 |
Phosphorous planar dopant source for low temperature applications |
摘要 |
A boron-containing heterocyclic compound prepared by reacting a primary amine of ammonia with an alkylene oxide or epoxide and then reacting concurrently or subsequently this reaction intermediate with a boric acid. This boron-containing heterocyclic compound may further be reacted with a metal metalloid or other metal compound and even further contain sulfur, such as a sulfide group.
|
申请公布号 |
US4800175(A) |
申请公布日期 |
1989.01.24 |
申请号 |
US19870056621 |
申请日期 |
1987.05.29 |
申请人 |
OWENS-ILLINOIS TELEVISION PRODUCTS INC. |
发明人 |
RAPP, JAMES E. |
分类号 |
H01L21/223;C04B35/63;(IPC1-7):H01L21/225 |
主分类号 |
H01L21/223 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|