| 摘要 |
<p>PURPOSE:To prevent breakage of a board and to make it possible to form plural elements provided in the same board uniformly without unevenness in quality and excellently in reproducibility by executing current application heat treatment among the heated atmosphere for the film of electron emitting material. CONSTITUTION:A formed element is heated from a room temperature up to an optional temperature of the straining point of a board 14 being the highest temperature or the melting point of the electron emitting material of a film 13 so as to generate the heating atmosphere among the air or inside a vacuum vessel by a general plate-shaped heater 13, and then current application heat treatment is executed by applying voltage to between electrodes 11, 12, and the film 13 of the electron emitting material is partially broken, deformed or transmuted so as to form an electron emitting part high in electric resistance. Hereby, the breakage of a board can be prevented and plural elements in the same board can be formed uniformly without unevenness in quality and excellent in reproducibility.</p> |
