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发明名称
MANUFACTURE OF GATE ELECTRODE
摘要
申请公布号
JPS6418272(A)
申请公布日期
1989.01.23
申请号
JP19870175644
申请日期
1987.07.14
申请人
SUMITOMO ELECTRIC IND LTD
发明人
MIYANO NAOYA
分类号
H01L21/3205;H01L21/28;H01L21/338;H01L29/80;H01L29/812
主分类号
H01L21/3205
代理机构
代理人
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