| 摘要 |
PURPOSE:To enable the formation of a superconductor film on a surface by a method wherein a metallic precursor and a plurality of organometallic precursors are provided and deposited on a surface, and a pattern is formed thereon before the metallic precursor film is oxidized and the film is subjected to heating so as to remove an organic component. CONSTITUTION:A resinate solution consisting of yttrium(Y), barium(Ba), and copper(Cu) is completely mixed to be a resinate mixture so that a metallic film containing those above-mentioned elements is formed. In case of a superconductor of Y Ba2Cu3O7, a mixing ratio of Y, Ba, and Cu is to be 1:2:3. A solvent is vaporized after a resinate mixture is provided on a substrate, and further the mixture is treated in a reducing atmosphere, so that an alloy is formed which contains Y, Ba, Cu adequate in mixing ratio. A metallic precursor film being formed, a pattern can be formed on it through a well-known photolithography technique. The metallic precursor film with a pattern formed on it is subjected to oxidation so as to be formed into a patterned superconductor film.
|
