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发明名称
摘要
申请公布号	JPS6412678(U)	申请公布日期	1989.01.23
申请号	JP19870105392U	申请日期	1987.07.10
申请人		发明人
分类号	B05C11/08;G03F7/16;H01L21/30;(IPC1-7):B05C11/08	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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