| 摘要 |
PURPOSE:To make a size of a pattern uniform inside a region to be exposed by changing and adjusting a radius of curvature of a condensing lens. CONSTITUTION:A light-transmitting liquid 6 is filled into a hermetically sealed space S formed by elastic films 1a; a pressure of this fluid acts on the films 1a; the films 1a are inflated like an arc; a degree of curvature of the arc-like films 1a is adjusted; a radius of curvature of a condensing lens 1 composed of the two films 1a, 1a is changed. If the radius of curvature of the condensing lens 1 is changed, a condensing degree of light is changed; the intensity of illumination of a whole region inside an area to be exposed can be made uniform. By this setup, an amount of light to be exposed inside the area to be exposed can be made uniform; a uniformly exposed pattern can be obtained. |
