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法人/股东/高管

发明名称	DRY ASHING DEVICE
摘要
申请公布号	JPS6418226(A)	申请公布日期	1989.01.23
申请号	JP19870175376	申请日期	1987.07.14
申请人	M T C JAPAN:KK	发明人	UMETANI MASAAKI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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