| 摘要 |
PURPOSE:To provide a superconductive thin film with uniform composition and structure having a high critical temp. Tc by performing physical evaporation with a composite oxide containing Y, Ba, Cu used as a target, and by forming a film of perovskite type oxide or pseudo perovskite oxide. CONSTITUTION:By the use of a target physical evaporation is made a composite oxide or the target of mixture of oxide and/or composite oxide containing at least one of Y, Ba, Cu to form a film of perovskite type oxide or pseudo perovskite oxide. The target shall preferably contain perovskite type oxide or pseudo perovskite oxide. Also the target consists of provisional sintering at 250-1200 deg.C of a powder mixture of oxide, carbonate, nitrate, or sulfate of Ba, oxide, carbonate, nitrate, or sulfate of Y, and oxide, carbonate, nitrate, or sulfate of Cu. Thus a superconductive thin film of oxide type having high Tc can be obtained. |
