| 摘要 |
PURPOSE:To use a detector in ultrahigh vacuum which can detect X-ray in soft X-ray area by housing a detector body, the ends of piping and a heat transfer body in a ultrahigh vacuum vessel in another vacuum system. CONSTITUTION:A detector body 14 is provided at the end of piping 15 and a ultrahigh vacuum vessel 25 is set to house the ends of the piping 15 and a heat transfer body 13, the detector body 14. A vessel 25 is made of, for example, stainless steel and is in another vacuum system different from the piping 15. The joining part of the piping 15 and the vessel 25 can be kept in ultrahigh vacuum by the aid of welding and the like. The joining part of the detector body 14 and the piping 15 is used in a heat insulation structure material 26 of ceramic and the like of small heat conductivity and the heat leakage is minimize. Therefore, the vacuum system of the vessel 25 can easily be applied without using organic substance, firing can easily be performed only on the part of the vessel 25 and so the vessel 25 can be applied in ultrahigh vacuum area, soft X-ray can be detected without using beryllium film and the like.
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