VACUUM DEPOSITION DEVICE,申请号JP19870175432-传众专利搜索

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发明名称	VACUUM DEPOSITION DEVICE
摘要
申请公布号	JPS6417858(A)	申请公布日期	1989.01.20
申请号	JP19870175432	申请日期	1987.07.13
申请人	JAPAN AVIATION ELECTRON IND LTD	发明人	ITO KAZUHIKO
分类号	C23C14/54;C23C14/30;H01L21/203	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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