| 摘要 |
PURPOSE:To make the crystallizability of a sample surface monitorable by installing an electron beam diffractor in an ultra-high vacuum chamber, and checking up on the pattern of a diffracted electron beam. CONSTITUTION:In an ultra-high vacuum chamber 4, there are provided with an electron gun, irradiating an electron beam OMEGA to the surface of a sample SIGMA, and a diffracted electron beam observer, observing a pattern of the electron beam OMEGA diffracted on the surface of the sample SIGMA. With this constitution, crystallizability of the sample SIGMA surface is observable at that spot all the time and, what is more, a crystal structure of the surface and an element abundance or the like are still more clearly findable. Moreover, if a time variation in the diffracted pattern and turbulence of the crystal structure are made into a data base, the obtained spectrum is compensated, thus such a spectrum that shows a true crystal structure is securable. |
