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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6417443(A)
申请公布日期
1989.01.20
申请号
JP19870173208
申请日期
1987.07.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YAMAMOTO SHINICHI;SAKAI HIROYUKI;KIKUCHI KAZUYA;YONEDA TADANAKA
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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