TESTING DEVICE FOR SEMICONDUCTOR DEVICE,申请号JP19870173311-传众专利搜索

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发明名称	TESTING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS6416973(A)	申请公布日期	1989.01.20
申请号	JP19870173311	申请日期	1987.07.10
申请人	MITSUBISHI ELECTRIC CORP	发明人	SAKAI KENICHI;OKADA KAZUHISA
分类号	G01R31/28;H01L21/66	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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