GAS PHASE ION SOURCE,申请号JP19870170428-传众专利搜索

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发明名称	GAS PHASE ION SOURCE
摘要
申请公布号	JPS6414848(A)	申请公布日期	1989.01.19
申请号	JP19870170428	申请日期	1987.07.08
申请人	JEOL LTD	发明人	KASAHARA HARUO
分类号	H01J27/26;H01J37/08	主分类号	H01J27/26
代理机构		代理人
主权项
地址

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