| 摘要 |
PURPOSE:To enable highly precise measurement, by a method wherein three detectors each measuring the distance from an object to be measured are arranged to a detector attaching table moving along a guide surface at equal intervals toward the moving direction and the distance is calculated from the measured values of a measurement start position and a K-th position by a predetermined calculation formula. CONSTITUTION:The measured values DOA, DOB, DOC at a measurement start position are obtained by three detectors arranged at equal intervals l and an object to be measured is moved at every the interval l to obtain the value DKA, DKB, DKC at a K-th position. The straightness errors of a guide surface at the measurement start position and a first position are set to X0, X1 while the straightness errors of the guide surface at the first and a second positions are set to Y1, Y2 and the straightness XK+2 of the guide surface at a (K+2)th position is calculated by the formula I and the XK+2 value calculated about K=0, 1,... is compensated by the numerical value related to X1, Y1, Y2 calculated so as to make the square average value of the straightness error to estimate and calculate the straightness of the guide surface. The straightness YK+2 of the object to be measured at this position and a vertical shaking amount OK+2 in a back-and-forth direction due to movement are respectively calculated by formulae II, III. |
