| 摘要 |
PURPOSE:To obviate the occurrence of contamination on treating parts by once storing the Ar gas recovered from a high pressure vessel after the treatment into a crude gas holder then subjecting this continuously to low temperature separation and refining the same and again using the same for the treatment. CONSTITUTION:The materail to be treated is loaded into a high-pressure vessel 1 and the refined Ar gas of a refined Ar gas holder 7 is filled and boosted by compressors 3 and 4. Thence, the HIP treatment of the material to be treated is accomplished in accordance with an ordinary method, the high-pressure vessel 1 and crude gas holder 2 are communicated at the treatment and the Ar gas is gravity- recovered by the differential pressure of both, following to which it is force-recovered through the low-pressure compressor 3. Thence, the recovered crude Ar gas is heat-exchanged with liquid nitrogen in a gas liquefier 9 to liquefy the greater portion thereof. The liquefied gas is supplied continuously into an Ar rectifying tower 5, where it is removed of impurities such as H2 and N2 having been contained therein. Further, the impurity oxygen contained is removed with switching type oxygen adsorbers 6, 6' and the gas is supplied and stored in the refined gas holder 7. |
