FORMATION OF THIN FILM,申请号JP19870170420-传众专利搜索

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发明名称	FORMATION OF THIN FILM
摘要
申请公布号	JPS6413721(A)	申请公布日期	1989.01.18
申请号	JP19870170420	申请日期	1987.07.08
申请人	SEIKO INSTR & ELECTRON LTD	发明人	NIWA HITOSHI;NAKANISHI AKISHIGE
分类号	H01L21/205;H01L21/22	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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