| 发明名称 |
Processing apparatus and method. |
| 摘要 |
<p>A process module (2000) having remote plasma (2010) and in situ plasma (2028) generators, and a radiant heater (2050), which represent three separate energy sources. The three sources can be used singly or in any combination and can be separately controllable.</p> |
| 申请公布号 |
EP0299247(A1) |
申请公布日期 |
1989.01.18 |
| 申请号 |
EP19880110010 |
申请日期 |
1988.06.23 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
DAVIS, CECIL J.;MATTHEWS,ROBERT T.;JUCHA, RHETT B.;LOEWENSTEIN, LEE M. |
| 分类号 |
C23C14/22;C23C14/24;C23C16/48;C23C16/517;C23C16/54;C23F4/00;(IPC1-7):C23C16/50 |
主分类号 |
C23C14/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
