发明名称 Interconnection method for semiconductor device.
摘要 <p>An interconnecting method for a semiconductor device which includes the steps of depositing a high-temperature superconductive material (15) over an interlevel insulation layer (14), and irradiating an energy beam onto a high-temperature superconductive material layer thus formed by the above step so as to effect anneal treatment.</p>
申请公布号 EP0299163(A2) 申请公布日期 1989.01.18
申请号 EP19880107375 申请日期 1988.05.07
申请人 SHARP KABUSHIKI KAISHA 发明人 NAKAGAWA, YASUHITO
分类号 H01L21/3205;H01L21/768;H01L23/522;H01L23/532;H01L39/24 主分类号 H01L21/3205
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