| 摘要 |
PURPOSE:To obtain a radiation image detector having high spatial resolution and high concentration resolution by forming the detector of at least two superconducting layers and an insulating layer interposed therebetween. CONSTITUTION:The superconductor layer 22 of a superconducting tunnel element 13 is, for example, formed of Sn of 4000Angstrom and an insulating layer 23 is formed, for example, of SnO2 of 10Angstrom . A junction area is, for example, 10<-4>cm<2>. A voltage is applied from a constant-voltage source 16 to the elements. A tunnel current corresponding to incident X-ray dose flows to the elements. A gate 14 and a capacitor 15 are bonded to the elements. When the gate 14 is closed, a tunnel current flows to the capacitor 15, and is held as charge. Thus, image information is held as storage charge of the capacitor. when data is read out, gates are opened or closed by gate signals 111-114, and output currents are obtained as signal outputs from 121-124. Accordingly, since it can be directly converted to an electric signal without converting it to an X-ray image, a radiation image detector having high image quality and high resolution can be obtained.
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