| 摘要 |
PURPOSE:To allow the mass production or a lengthy oxide superconductive material by using a lengthy flexible ceramic material with the preset thickness as a substrate material, continuously forming a superconductive raw material thin film while winding and running it, and heat-treating this thin film. CONSTITUTION:For the spattering method, a flexible ceramic substrate 8 with the thickness of about 50mum is first set on a delivery roll 1, and the special surface treatment is applied in a pre-processing mechanism 2. A superconductive target material 6 is spattered to the fixed thickness by a spattering mechanism 7 while the preset substrate temperature is kept stable by a main roll 3 having the heating function, then the substrate is stabilized by a heat treating mechanism 4 as a superconductive material, which is wound by a winding roll 5. Al2O3, ZrO2, Y2O3, SiO2, CaO, BaO, TiO2 are used for the flexible ceramic. |
